GF40 Series Elastomer Sealed Thermal Mass Flow Controllers and Meters
Product Overview
Brooks Instrument GF40 Series elastomer sealed mass flow controllers and meters offer extensive flexibility and productivity with the ability to handle multiple gases in one device. In addition, utilizing Brooks Instrument’s exclusive MultiFlo™ technology, the GF40 series is the perfect option for processes that either use a variety of gases, change gas types frequently, or need to re-range while preserving gas measurement and control accuracy. The Brooks Instrument GF40 enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
For more information about Brooks Instrument GF40 Series Elastomer Sealed Thermal Mass Flow Controllers and Meters, contact a Cross flow and safety technologies expert or take a look at some highlighted details below.
Features and Benefits
Take a look at some of the features and benefits of the GF40 Series
Programmable multi-gas/multi-range capabilities
Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
Sub-1 second flow response time and accuracy of 1% set point for demanding applications
Well suited for a variety of gases
Fast response, Hastelloy sensor
Easily accessible diagnostic service port is independent of tool communication
Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
Specifications
For full specifications, including electrical, diagnostics, and compliance information, download the product specification sheet below.
Performance
Flow Range (Full Scale Capacity): .3 sccm – 50 slpm
- Standard: ± 2% reading, ± 0.5% full scale
- Optional: ± 1% reading, ± 0.5% full scale
Accuracy (Pressure): 1% of SP 35-100%, 0.35% of FS 2-35%
Repeatability: 0.20% SP
Flow Temperature Coefficient: ±0.1% of FS per °C
Linearity: ±0.5% FS (included in accuracy)
Response Time: Normally Closed Valve: 300 ms – <1 sec
Multi-Gas and Range Configurability: MultiFlo™ Available
Control Range: 2-100%
Number of Bins: 10 Bins
Valve Shut Down: Closes valve when set point drops below 1.5% full scale
Zero Stability: <±0.5% FS per year
Pressure Coefficient: 0.03% per psi (0-50psi N2)
Mechanical
Seal Material: Elastomer
Surface Finish: 32µ inch Ra
Wetted Materials:
- 316L Stainless Steel
- Hastelloy C-22
- 1707 PH
- 43055
Valve Options:
- Normally Closed
- Normally Open
- Meter (no valve)
Ratings
Temperature Range: 5-50oC (41-122oF)
Max Pressure: 150 psig/10 bar
Differential Pressure Range:
- 3-860 sccm = 7-45 psid
- 861-7200 sccm = 15-45 psid
- 7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
Leak Integrity: 1×10-10 atm cc/sec He
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