Metrology Glossary: Vacuum Gauge

What Is A Vacuum Gauge?

A vacuum gauge is a specialized tool used to measure the pressure within a vacuum, characterized by a pressure level lower than that of the Earth’s atmospheric conditions. Vacuum gauges are typically classified into two primary categories: high vacuum gauges and low vacuum gauges. High vacuum gauges are engineered to measure pressures that fall below the threshold of 10^{-3} torr, providing precision in ultra-low-pressure environments. On the other hand, low vacuum gauges are designed for measuring pressures exceeding 10^{-3} torr, ensuring accurate readings for less extreme vacuum conditions. These devices serve as indispensable tools in maintaining and controlling vacuum systems across a wide range of applications.

What Are Vacuum Gauges Used For?

High Vacuum Gauges:

Semiconductor Manufacturing: Vacuum gauges play a crucial role in overseeing and regulating pressure within semiconductor fabrication chambers. These chambers require extremely low pressures to prevent contamination and ensure the efficient operation of etching and deposition processes.
Vacuum Furnaces: Vacuum gauges are essential for monitoring and managing pressure. Vacuum furnaces are employed to heat materials without the presence of air, preventing oxidation and other undesirable reactions.
Analytical Chemistry: Vacuum gauges find application in various analytical chemistry instruments such as mass spectrometers and electron microscopes. They are used to measure and regulate pressure within vacuum chambers, ensuring optimal performance.
Research and Development: In diverse research and development settings, vacuum gauges are employed for studying material properties under low-pressure conditions and developing innovative technologies for vacuum processing.

Low Vacuum Gauges:

HVAC Systems: Vacuum gauges are employed in HVAC systems to evacuate air and other gases before charging them with refrigerant. This vacuum-pulling process helps eliminate contaminants, ensuring the efficient operation of the system.
Vacuum Packaging: Vacuum gauges are used to monitor and adjust pressure in vacuum packaging. This packaging technique extends the shelf life of food and various products.
Medical Equipment: Vacuum gauges play a vital role in various medical devices, including suction devices and vacuum-assisted delivery systems.
Automotive Applications: Widely utilized in automotive settings, vacuum gauges contribute to monitoring and controlling vacuum pressure, particularly in brake systems.